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Plasma-Surface Interactions I

2:00 pm – 4:30 pm, Tuesday October 14 Session ET3 COEX, Room E2-E3
Chair:
Xingyi Shi, Applied Materials
Topics:

Fundamental properties of plasmas in interaction with targets

2:30 pm – 2:45 pm
Presenter: Ana Sobota (Eindhoven University of Technology)
Authors: Olivier Rooij, van (Eindhoven University of Technology), Marlous Hofmans (Eindhoven University of Technology), Pedro Viegas (Instituto Superior Técnico - Universidade de Lisboa), Anne Bourdon (Ecole Polytechnique), Olivier Guaitella (LPP, Ecole Polytechnique, CNRS)

The interaction of non-thermal atmospheric pressure plasmas and targets affects the properties of the gas-phase plasma. This presentation discusses the profile of the electric field in the gas phase and how it is affected by targets, the electron density profile and behaviour and the evolution of the discharge over time and it shows that the electrical properties of the target govern the behaviour of the discharge in the gas phase.

PRESENTATIONS (7)