Workshop: Combining Plasma Modeling and Artificial Intelligence
10:00 am – 3:30 pm,
Monday October 13 Session IM2 COEX, Room E6
PRESENTATIONS (9)
- 10:00 am – 10:30 amIntegrated modeling and simulation incorporating machine learning methods: case studies and perspectives on usefulness
Peter L Ventzek (presenter)
- 10:30 am – 11:00 amAtomistic Simulation of Reactive Ion Etching using Machine Learning Interatomic Potentials
Changho Hong (presenter), Hyungmin An, Sangmin Oh, Seungwu Han
- 11:00 am – 11:30 amQuantitative Analysis of Mono-Energetic Ion Flux Control in Atomic Layer Etching via Tailored Waveform Profiles
Hyungseon Song (presenter), Sebastian Mohr
- 11:30 am – 12:00 pmBridging Plasma Equipment and Surface Processes: Insights from Simulation and AI
Byungjo Kim (presenter)
- 12:00 pm – 1:30 pmLunch
- 1:30 pm – 2:00 pmEnhancement of the simulation speed of a particle-in-cell method combined with machine learning technology
HaeJune Lee (presenter)
- 2:00 pm – 2:30 pmData-driven state and parameter estimation for low temperature plasmas
Kentaro Hara (presenter), Anubhav Dwivedi
- 2:30 pm – 3:00 pmAI/ML in Fusion research
Andrew Christlieb (presenter)
- 3:00 pm – 3:30 pmCoffee