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Poster Session II

4:30 pm – 6:30 pm, Wednesday October 15 Session DW5 COEX, Lobby E
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Size and shape control of silver nanoparticle in RF-biased inductively coupled plasma

Poster 55
Presenter: Jin-Hoo Seong (Korea Research Institute of Standards and Science)
Authors: Min Young Yoon (Korea Aerospace University), Hee-Jung Yeom (Korea Research Institute of Standards and Science), Yeo-Jin Choi (Kumoh National Institute of Technology), Sung-Jin An (Kumoh National Institute of Technology), TaeWan Kim (University of Seoul), Jung-Hyung Kim (Korea Research Institute of Standards and Science), Hyo-Chang Lee (Korea Aerospace University)

Silver nanoparticles (Ag NPs) have promising applications due to their tunable physical, optical, and biological properties. Plasma ion–surface interactions offer a low-temperature method for producing high-purity, well-dispersed Ag NPs. In this work, we investigated how key plasma ion parameters—namely energy, density, and fluence—influence the formation of Ag NPs in RF-biased inductively coupled plasma. Our findings demonstrate that although ion energy plays a vital role in determining nanoparticle characteristics, fine control over the particle size is more effectively realized by regulating the number of incident ions. Notably, this ion number control enables modulation of both the size and shape of Ag NPs, even under low-energy conditions. We further established a process window where independent control over nanoparticle size and number density can be achieved through appropriate tuning of the plasma ion properties.

Funding acknowledgement

This study was supported by the Technology Innovation Program, funded by the Ministry of Trade, Industry & Energy(MOTIE, Korea) (grant no. RS-2024-00507767, 00508070, 2410000200, 2410000258, 2410003567), the Ministry of Science and ICT and the R&D Convergence Program of the National Research Foundation (NRF) of Korea (grant no. CRC20015-000), the Korea Semiconductor Research Consortium (KSRC) (grant no. 00235950, 00237058), the Korea Research Institute of Standards and Science (grant no. KRISS GP2025-0013-02), and the 2023 Korea Aerospace University Faculty Research (grant no. 202300250001)

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