Capacitively Coupled Plasmas II
9:00 am – 10:30 am,
Thursday October 16 Session GR1 COEX, Room E5
Scaling of Capacitively Coupled Plasmas Properties up to 10s of kV Driving Voltages
10:00 am – 10:15 amPresenter: Andrew Tasman Powis (Princeton Plasma Physics Laboratory, Princeton, USA)
Authors: Sarveshwar Sharma (Institute for Plasma Research), Alexander Khrabrov (Princeton Plasma Physics Laboratory (PPPL)), Igor Kaganovich (Princeton Plasma Physics Laboratory (PPPL))
Industry is utilizing Capacitively Coupled Plasma (CCP) discharges with voltage amplitudes in the 10s of kV range, or even higher. These discharges are essential for anisotropic high aspect ratio etching in semiconductor manufacturing, particularly for high-density memory production. Particle-In-Cell (PIC) modelling of the resulting high-density discharges is challenging due to resolution requirements over a wide range of plasma time and length scales. With a parallel and GPU accelerated 1D-3V PIC code, we explore the scaling of plasma profiles, ion velocity distribution functions impinging on the wafer, and electron energy distribution functions (EEDFs) in a low-pressure Argon CCP discharge with driving voltages from 1 to 32 kV. The resulting EEDFs exhibiting a very long tail of energetic electrons. Furthermore, the discharge is extinguished at high voltages when the sheath width becomes comparable in the gap size.
Funding acknowledgement
This research was supported by the U.S. Department of Energy through the PPPL CRADA agreement with Applied Materials. PPPL is a national laboratory operated by Princeton University for the U.S. Department of Energy under Prime Contract No. DE-AC02-09CH11466.
PRESENTATIONS (6)
- 9:00 am – 9:15 amDifferent methods for improving uniformity of very high frequency capacitively coupled discharges
Denis Eremin (presenter), Yulia Sharova, Liang Xu, Masaaki Matsukuma, Thomas Mussenbrock, Ralf Peter Brinkmann
- 9:15 am – 9:30 amElectron dynamics and particle transport in capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveform
Wan Dong (presenter), Zhuo-Yao Gao, Li Wang, Ming-Jian Zhang, Chong-Biao Tian, Yong-Xin Liu, Yuan-Hong Song, Julian Schulze
- 9:30 am – 9:45 amSimulation benchmarks of the PIC-MCC codes XPDP1 and VSim for helium capacitively coupled plasma discharges with spatiotemporal analysis
Kaviya Aranganadin (presenter), Guo-Ning Wang, Hua-Yi Hsu, John P. Verboncoeur, Ming-Chieh Lin
- 9:45 am – 10:00 amOn electron power absorption in low pressure electronegative capacitive discharges
Jon Gudmundsson (presenter)
- 10:00 am – 10:15 amScaling of Capacitively Coupled Plasmas Properties up to 10s of kV Driving Voltages
Andrew Tasman Powis (presenter), Sarveshwar Sharma, Alexander V. Khrabrov, Igor D Kaganovich
- 10:15 am – 10:30 amIon energy distribution transitions from multimodal to quasi-single-peak in capacitive discharges driven by tailored voltage waveforms
Deqi Wen (presenter), Chan Feng, Jon Gudmundsson, John P. Verboncoeur, Julian Schulze, You-Nian Wang