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Poster Session I

4:30 pm – 6:30 pm, Tuesday October 14 Session DT4 COEX, Lobby E
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Structural Resonance Characteristics of Ceramic-Shielded Cutoff Probe in Low-Pressure Plasmas

Poster 38
Presenter: Do-Yeon Hwang (Korea Research Institute of Standards and Science)
Authors: Hee-Jung Yeom (Korea Research Institute of Standards and Science), Hye-Jin Ju (Korea Research Institute of Standards and Science), Wooram Kim (Korea Research Institute of Standards and Science), Jung-Hyung Kim (Korea Research Institute of Standards and Science), Hyo-Chang Lee (Korea Aerospace University)

To facilitate precise plasma density measurements in processing plasma and high-density plasma environments, a ceramic-shielded cutoff probe (CSC) has been developed, and studies on the structure of the ceramic shield have also been conducted. However, the periodic resonance signals commonly observed in previous CSC studies can cause difficulties in precisely measuring plasma density. [1,2] In this study, we investigated the mechanisms and suppression of periodic resonance signals of the CSCs. Through electromagnetic simulations and experiments, it was confirmed that structural resonance effects lead to the formation of standing waves inside the CSC ceramic body, resulting in the generation of periodic resonance signals. It was also confirmed that the structural resonance effect can be eliminated by electrically connecting the metal shields of the coaxial cable near the antennas. These results are expected to contribute to more accurate electron density measurements in harsh plasma environments using CSCs.

Funding acknowledgement

This research was supported by the Technology Innovation Program, funded by the Ministry of Trade, Industry & Energy(MOTIE, Korea) (grant nos. RS-2024-00507767, 0508070, 2410000200, 2410000258, 2410003567); Ministry of Science and ICT and the R&D Convergence Program of the National Research Foundation (NRF) of Korea (grant no. CRC20015-000) ;Korea Semiconductor Research Consortium (KSRC) (grant nos. 00235950, 00237058);Korea Research Institute of Standards and Science (grant no. KRISS GP2025-0013-02);2023 Korea Aerospace University Faculty Research (grant no. 202300250001)

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