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Poster Session I

4:30 pm – 6:30 pm, Tuesday October 14 Session DT4 COEX, Lobby E
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effect of non-maxwellian electron energy distributions on the collisional-radiative model of argon inductively coupled plasmas

Poster 63
Presenter: Hyeong-Seok Kang (Korea Aerospace University)
Authors: Kil-Byoung Chai (Korea Atomic Energy Research Institute), Hyo-Chang Lee (Korea Aerospace University)

the collisional-radiative (CR) model is a numerical modeling approach used to determine plasma parameters such as electron density and electron temperature by analyzing the intensity of emitted light from plasmas. previous studies on CR modeling typically assumed a maxwellian or ideal non-maxwellian electron energy distribution function (EEDF). however, low-temperature plasmas commonly exhibit non-maxwellian EEDFs with the depletion of high-energy electrons, that means conventional CR modeling may not accurately reflect the actual plasma. in this study, we calculate key spectral line intensities of argon inductively coupled plasma using a CR model based on experimentally measured EEDFs obtained through a langmuir probe. to compensate depopulation of high-energy electron group, we developed effective EEDF that includes depletion of high energy electrons. a comparative analysis is conducted between the results derived from depleted theoretical maxwellian EEDFs and those obtained using the experimentally measured distributions. a substantial enhancement in model accuracy was observed when using depleted maxwellian distribution, as compared to the general maxwellian distribution.

Funding acknowledgement

This research was supported by the Technology Innovation Program, funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea) (grant no. RS-2024-00507767, 00508070, 2410000258, 2410003567), the Ministry of Science and ICT (grant no. RS-2025-02413231) and the R&D Convergence Program of the National Research Foundation (NRF) of Korea (grant no. CRC20015-000), Korea Evaluation Institute of Industrial Technology (KEIT) (grant no. RS-2025-02222140), the Korea Semiconductor Research Consortium (KSRC) (grant no. 00235950), and the 2023 Korea Aerospace University Faculty Research (grant no. 202300250001)

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