Schedule Logo

Poster Session I

4:30 pm – 6:30 pm, Tuesday October 14 Session DT4 COEX, Lobby E
Topics:
PrevNext

influence of sheath thickness on cutoff probe diagnostics in low-pressure plasmas

Poster 41
Presenter: Hye-Jin Ju (Korea Research Institute of Standards and Science)
Authors: CHANWON PARK (Korea Research Institute of Standards and Science), Hee-Jung Yeom (Korea Research Institute of Standards and Science), Jung-Hyung Kim (Korea Research Institute of Standards and Science), Hyo-Chang Lee (Korea Aerospace University)

The cutoff probe is known to be a highly precise diagnostic method that measures the electron density through the transmission microwave frequency (TMF) spectrum of the plasma. In particular, the plasma density measured by the cutoff probe is reported to be unaffected by the sheath thickness formed around the antennas of the cutoff probe. However, studies on the TMF spectrum of the cutoff probe with respect to the sheath thickness have focused primarily on theoretical calculations, while experimental validation remains relatively insufficient. In this study, we establish an experimental setup that enables the control of the sheath thickness around the antennas of the cutoff probe by applying a DC voltage. Plasma density is measured using the developed setup, and the results are compared with electromagnetic wave simulations, where the sheath thickness is systematically varied from 28.57% to 100% of the gap between the two probe tips. Consequently, we confirm that the plasma density measured by the cutoff probe is independent of the sheath thickness.

Funding acknowledgement

This research was supported by the Technology Innovation Program, funded by the Ministry of Trade, Industry & Energy(MOTIE, Korea) (grant nos. RS-2024-00507767, 00508070, 2410000200, 2410000258, 2410003567); Ministry of Science and ICT and the R&D Convergence Program of the National Research Foundation (NRF) of Korea (grant no. CRC20015-000) ; Korea Semiconductor Research Consortium (KSRC) (grant nos. 00235950, 00237058); Korea Research Institute of Standards and Science (grant no. KRISS GP2025-0013-02); 2023 Korea Aerospace University Faculty Research (grant no. 202300250001)

POSTERS (97)