Poster Session I
4:30 pm – 6:30 pm,
Tuesday October 14 Session DT4 COEX, Lobby E
Real-Time Plasma Density Measurement using a Capacitance Measurement Sensor Embedded in an Electrostatic Chuck
Poster 91Presenter: ChangHee Lee (KwangWoon University)
Authors: JiHwan Kim (Kwangwoon University), InYoung Bang (Kwangwoon University), JaeHyeon Kim (Kwangwoon University), GwangHo Lee (Kwangwoon University), HyoJong Shin (Kwangwoon University), YoonJoo Jeong (Kwangwoon University), InHyeok Kho (Kwangwoon University), YuJin Heo (Kwangwoon University), HeeSam Cheon (Kwangwoon University), Yejun Cheon (Kwangwoon University), GaEun Hwang (Kwangwoon University), GiChung Kwon (Kwangwoon University)
Collaboration: Kwangwoon University
In plasma processes used for semiconductors and displays, the need for plasma diagnostics is increasing to enable accurate process control. Therefore, a diagnostic method that can be applied to actual process gases and monitor plasma conditions without perturbing the plasma is essential. Currently, diagnostic tools such as the Langmuir probe are employed to measure plasma density in the semiconductor industry. However, these techniques have limitations in their applicability to reactive process gases and in their restricted diagnostic regions. In addition, since the probe is directly exposed to the plasma, issues such as contamination and corrosion can lead to measurement errors. Moreover, such direct contact can interfere with the plasma, making it difficult to maintain stable processing conditions.
In this study, a coplanar electrode sensor embedded within the electrostatic chuck was utilized to prevent contamination and corrosion. The sensor was embedded inside the chuck to enable plasma monitoring and real-time plasma density measurement. The results were compared and analyzed against those obtained using a single Langmuir probe (SLP) and optical emission spectroscopy (OES). Experiments were conducted by varying the applied power of a capacitively coupled plasma (CCP) source using a 13.56 MHz RF generator.
POSTERS (97)
- Poster 1Uncovering and Analyzing the Scientific Impact of LXCat in Low-Temperature Plasma (LTP) Research: An NLP and Data-Driven Approach
Bhaskar Chaudhury (presenter), Kalp K Pandya, Khushi Shah, Nakshi Shah, Nirmal D Shah
- Poster 2Low global warming potential gas for plasma processing application
Nidhi Sinha (presenter), Mi-Young Song, Heechol Choi
- Poster 3Determination of the electron temperature in argon plasmas using collisional-radiative model without model-dependent assumptions on metastable diffusion and radiation trapping effect
Changmin Shin (presenter), Kil-Byoung Chai, Duck-Hee Kwon, Haewon Shin, Wonho Choe
- Poster 4Excitation of helium by proton impact
Liam H Scarlett (presenter), Corey T Plowman, Dmitry V Fursa, Mark C Zammit, Igor Bray
- Poster 5Electronically resolved excitation in proton collisions with H2
Liam H Scarlett (presenter), Corey T Plowman, Mark C Zammit, Igor Bray, Dmitry V Fursa
- Poster 6Electron collision cross sections for H2 and NH3 relevant to N2-H2 plasma modelling
Shubham Singh Baghel (presenter), Luis Marques, Luís L Alves
- Poster 7Monte Carlo Analysis of Electron Swarm Parameters in Nitrogen under Radio-Frequency Electric Fields
Yuma Okubo (presenter), Ryota Okazaki, Hirotake Sugawara
- Poster 8Charges in a Bose-Einstein condensate
Robin Cote (presenter), Vasili Kharchenko
- Poster 9Neutral temperature measurements in ADITYA-U Tokamak
ANKIT KUMAR (presenter), Malay Bikas Chowdhury, Aman Gauttam, Joydeep Ghosh, ADITYA-U Team
- Poster 10Quantitative Evaluation of Ozone Decomposition Rate Coefficient via Collisions with Water Vapor Molecules
Koki Matano (presenter), Keisuke Yoshida, Tomohiro Furusato, Takahiko Yamashita, Takumi Iwanaga, Ryuji Ikeda, Tetsushi Okamoto
- Poster 11Calculations of positron scattering from atoms and molecules
Liam H Scarlett (presenter), Nicolas Mori, Dmitry V Fursa, Igor Bray, Haadi Umer
- Poster 12Investigation of Warm Dense Matter with Under Water Exploding Wire (UEWE)
Marcus Iberler (presenter), Andre Michel, Marius U Dehmer, Gustav Schmidt, Joachim Jacoby
- Poster 13Analysis of electron energy probability functions in Ar/SiH4 inductively coupled plasmas with varying gas mixing ratios
SEONGHYEON KIM (presenter), Hee-Jung Yeom, Min Young Yoon, Yeong-Jae Jeong, Seong-Bin Park, Chin-Wook Chung, Jung-Hyung Kim, Hyo-Chang Lee
- Poster 14Pulsed Inductively Coupled Plasmas: plasmas parameters and sheath thickness
Jun Hyung Park (presenter), Gwang-Seok Chae, Jung Hyung Kim, Hyo-Chang Lee
- Poster 15Experimental Study of Particle Exhaust Driven by Photon Momentum in a Dusty Plasmas under Semiconductor Processing Conditions
Jun Hyung Park (presenter), Hyo-Chang Lee
- Poster 16Evaluation of Fluctuation of Plasmas Diagnosed by Excited-State Population Variation Using Stochastic Model Based on Relative Entropy
Hiroshi Akatsuka (presenter), Yosuke Shimada
- Poster 17Experimental Confirmation of Kolmogorov-Type Turbulent Scaling in a High-β Magnetically Screened Plasma
Ayan Adhikari (presenter), Amulya K Sanyasi, Devendra Sharma, Pankaj K Srivastava, Lalit M Awasthi, Mainak Bandyopadhyay
- Poster 18Monte Carlo Simulation of Fast Neutrals impinging on Substrate
Kazuki Denpoh (presenter), Masaaki Matsukuma
- Poster 19Inception and Growth of Electrodeless Double-Headed Streamer Discharges at atmospheric pressure
Baptiste Disson (presenter), Goran Sretenovic, Vesna Kovacevic, Nelly Bonifaci, Cécile Pichard, Christophe Cachoncinlle, Ahmed Khacef, Sylvain Iseni
- Poster 20Flux Divergence Evaluation in Partially Ionized Plasmas Using a Continuity Equation in the Presence of Magnetic X-Point Configurations
Hoiyun Jeong (presenter), Yegeon Lim, Alvin Amry Sugianto, Bin Ahn, Seungmin Bong, Young-chul Ghim
- Poster 21Electric breakdown inside a gas hole in contact with plasma
Jiseong Nam (presenter), Lee Minkeun, Kyoung-Jae Chung
- Poster 22Experimental investigation of edge-to-center density ratios in argon and neon capacitively coupled plasmas
Chanwoo Park (presenter), CHANWON PARK, Gwang-Seok Chae, Hyo-Chang Lee, Jung-Hyung Kim
- Poster 23Investigation of Penning Ionization in Helium CCRF Plasma via Optical Emission Spectroscopy
Varsha Sunil Varsha SuniL (presenter), Prabhakar Srivastav, Yukti Goel, Milaan Patel, Vishal Kumar Sharma, Hem Chandra Joshi, Jinto Thomas
- Poster 24Horizontal surface wave propagation in the sheath by the nonuniform electrode structure affecting plasma uniformity in RF capacitively coupled plasma
Mirin Yun (presenter), HaeJune Lee, Eunseo Lee
- Poster 25Nonlinear sheath dynamics in dual-frequency argon plasmas with two-stack dielectric structure
Yugyeong Suh (presenter), HaeJune Lee
- Poster 26Photon-induced electron-detachment from negatively charged glass and ceramic substrates.
Ruben Enrique E Montero Franco (presenter), Sander Nijdam, Dick Harberts, Lieke Ruijs
- Poster 27Kinetic modelling of catalytic methane oxidation by plasma-activated NOX specie
Pedro Viegas (presenter), Farzaneh Ostovarpour, Baptiste Granet, Vasco Guerra, Karina Shimizu, Adílson Freitas
- Poster 28Analysis of the formation of stable species in atmospheric pressure DBDs in Ar-TMS mixtures
Hans Höft (presenter), Detlef Loffhagen, Marjan Stankov, Markus M Becker, Nickolas Steppan, Claus-Peter Klages, Lars Bröcker
- Poster 29Reduction of UV-Induced Damage Using a Controllable Electron Temperature Plasma Source
Yujin Yeo (presenter), Min-Seok Kim, UnJae Jung, Chin-Wook Chung
- Poster 30Atmospheric pressure microwave plasma for selective acetylene production
Tim Righart (presenter), Dirk van den Bekerom, Niek den Harder, Gerard van Rooij
- Poster 31Electric Field-Induced Coherent Anti-Stokes Raman Scattering in the Visible Region from Water Molecules
Lisa Kobodo (presenter), Takeru Koike, David Pai, Hitoshi Muneoka, Kazuo Terashima, Tsuyohito Ito
- Poster 32Investigation of Ion Movement Patterns and Properties Within a Magnetic X-point System
Alvin Amry Sugianto (presenter), Yegeon Lim, Hoiyun Jeong, Bin Ahn, Young-chul Ghim
- Poster 33Tomographic Reconstruction of Absolute CF2 Density in Fluorocarbon Plasma
Hyeondo Cho (presenter), Jin Hee Bae, Sanghoo Park
- Poster 34Improving Actinometric Diagnostics for Application to CF₄-containing Plasmas
Vasco Guerra (presenter), Mariana Ribeiro, Tiago Silva, Nikolay Britun
- Poster 35Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis
Wentao He (presenter), Tetsuji Kiyota, Kenta Doi, Yuya Yamashita, Wataru Kikuchi, Shuhei Watanabe, Ayaki Sakurai, Yuchen Ye, Kazuki Shimatani, Atsushi Nezu, Hiroshi Akatsuka
- Poster 36Automated Continuum-Line Spectrum Decomposition for Optical Emission Spectroscopic Diagnostic of Atmospheric-Pressure Plasmas
Wataru Kikuchi (presenter), Jun Enomoto, Keren Lin, Tomoya Taguchi, Hiroshi Akatsuka
- Poster 37Development of a Microwave-Based Patch Antenna Sensor for Measuring Plasma Uniformit
Gwang-Seok Chae (presenter), Hee-Jung Yeom, Min Young Yoon, Eun-Seok Choe, Jung Hyung Kim, Hyo-Chang Lee
- Poster 38Structural Resonance Characteristics of Ceramic-Shielded Cutoff Probe in Low-Pressure Plasmas
Do-Yeon Hwang (presenter), Hee-Jung Yeom, Hye-Jin Ju, Wooram Kim, Jung-Hyung Kim, Hyo-Chang Lee
- Poster 39Comparison of sheath thickness measurement methods using cutoff probe
JinHyeok jang (presenter)
- Poster 40Structured Comparison of Multi-Layer Perceptron Design Elements for Accurate Smoothing of Electron Energy Probability Functions
A ra Jo (presenter), June Young Kim
- Poster 41influence of sheath thickness on cutoff probe diagnostics in low-pressure plasmas
Hye-Jin Ju (presenter), CHANWON PARK, Hee-Jung Yeom, Jung-Hyung Kim, Hyo-Chang Lee
- Poster 42Determination of Electron Velocity Distribution Functions via Neural Network-based Smoothing
Chang su Kim (presenter), Jungmin Park, A ra Jo, June Young Kim
- Poster 43Data-Driven Approach to Plasma Electron Temperature Estimation Using VI Probe Harmonics
Yonghyun Kim (presenter), Jong-Sik Kim
- Poster 44Development of a precise broadband high-voltage divider
Tobin Knautz (presenter)
- Poster 45Machine-Learning Data Processing for Accurate Langmuir Probe Diagnostics
Jeonghun Ko (presenter), Jongchan Kim, Sanghoo Park
- Poster 46Influence of Probe Geometry on the Transmission Characteristics of Microwave Cutoff Probe
Jae-Heon H Lee (presenter), Hee Jung Yeom, Gwang-Seok Chae, Jung-Hyung Kim, Hyo-Chang Lee
- Poster 47Electron Density Measurement in High-Pressure Plasma with a Microwave Cutoff Probe
Seong-Bin Park (presenter), Hee-Jung Yeom, Do-Yeon Hwang, Young-Joo Kim, Hyo-Chang Lee, Jung Hyung Kim
- Poster 48Machine Learning-Based Prediction of Electron Energy Distribution Function in Low-Pressure Argon Plasmas
Chunyue Huang (presenter), Changmin Shin, Jonggu Han, Se Youn Moon, Wonho Choe
- Poster 49Tomographic Reconstruction of Capacitively Coupled Plasma Structure Using Multi-Directional Imaging
Ryota Izumi (presenter), Hayato Yoshikawa, Haruka Suzuki, Hirotaka Toyoda
- Poster 50The LisbOn KInetics LoKI-B+C simulation tool
Luís L Alves (presenter), Pedro Pereira, António Tejero-del-Caz, Armando Gonçalves, Nuno Pinhão, Jan van Dijk, Daan J Boer
- Poster 51Memory and Performance Optimization of a GPU Parallelized PIC-MCC Simulator
Matthew Anderson (presenter), Kim Jinseok, Masaaki Matsukuma
- Poster 52A Generalized External Circuit Model for high order Electrostatic IFE-PIC codes
Yong Cao (presenter)
- Poster 53A physics-based simulation framework for ion transport and surface interaction analysis in high-aspect ratio etching
Do Hun Lee (presenter), Jun Pyo Hong, Youngmin Sunwoo, Semin Kim, Taeyoung Kim, Byungjo Kim
- Poster 54Fourier Neural Operator (FNO) augmented 2D Fluid simulations of High-Power Microwave (HPM) breakdown
Kalp K Pandya (presenter), Shivam Gandha, Ajeya Mandikal, Bhaskar Chaudhury
- Poster 55Using non-conforming triangular meshes in fluid modeling of atmospheric-pressure discharges
Markus M Becker (presenter), Igor L Semenov
- Poster 56Effect of driving frequency on electrostatic and electromagnetic fields in capacitively coupled Ar plasmas using a two-dimensional particle-in-cell simulation
Ji Hyun Shin (presenter), Rohini Mishra, Saravanapriyan Sriraman, Hae June Lee
- Poster 57Optimization of Surface Kinetics Schemes via Machine Learning Methods
Pedro Viegas (presenter), José Afonso, Vasco Guerra
- Poster 58PPPL Modeling Tools for Princeton Research Collaborative Facility
Willca Villafana (presenter), Igor D Kaganovich, Stephane Ethier, Shoaib Khalid, Alexander V. Khrabrov, Alexander Khrabry, Mikhail Mokrov, Andrew Tasman Powis, Dmytro Sydorenko, Salman Sarwar
- Poster 59A High-Precision Multi-Step Particle-in-Cell Method with Explicit Prediction and Implicit Correction
Jingwen Xu (presenter), Yu Wang, Zili Chen, Shimin Yu, Hongyu Wang, Wei Jiang, Ya Zhang
- Poster 60Application of Value Iterative Processes in Reinforcement Learning: Feature Analysis of Reaction Networks in Silane Thermal Decomposition and Silane Plasma
Issei Yonemoto (presenter), Kota Hamano, Taku Iguchi, Shigeyuki Miyagi, Osamu Sakai
- Poster 61Numerical simulations of DC discharges in Argon: Investigating light emission spatial profiles
Aubrey L Zimmer (presenter), Christopher H Moore, Andrew S Fierro
- Poster 62Revisiting argon glow discharges: where do the current models fail and why
Vasco Guerra (presenter), Tarek Ben Slimane, Tiago P Silva
- Poster 63effect of non-maxwellian electron energy distributions on the collisional-radiative model of argon inductively coupled plasmas
Hyeong-Seok Kang (presenter), Kil-Byoung Chai, Hyo-Chang Lee
- Poster 64Assessing the Impact of Cross-Section Data Variability on Particle-in-Cell Monte Carlo Collisions (PIC-MCC) Simulations of Low-Temperature Plasmas (LTP) via Uncertainty Quantification
Ayushi Sharma (presenter), Libin Varghese, Bhaskar Chaudhury
- Poster 65Verification and Performance Evaluation of a Massively Parallel PIC-MCC Code for Low-Temperature ExB Plasma Simulation
Libin Varghese (presenter), Ayushi Sharma, Bhaskar Chaudhury
- Poster 66Modeling of atmospheric pressure Helium/Oxygen mixture discharges in extremely narrow gap
Haruaki Akashi (presenter), Tomokazu Yoshinaga
- Poster 67Pulsed capillary discharge with special shape of current in a large diameter tube
Alexandr Jancarek (presenter), Nadezhda Bobrova, Michal Nevrkla, Pavel Sasorov, Jiri Sisma, Pavel Vrba, Jakub Hubner, Miroslava Vrbova
- Poster 68Enhanced Power Coupling in a Microwave Plasma via Electrode-Tube Gap Adjustment
Hyung-Gu Kang (presenter), Gunsu Yun
- Poster 69Numerical simulation of breakdown characteristics of capacitively coupled hollow cathode discharge
Yu Wang (presenter), Zhaoyu Chen, Zili Chen, Hongyu Wang, Wei Jiang
- Poster 70Chemistry Catalog (ChemCat): An open data platform for reproducible plasma chemistry simulations
Daan J Boer (presenter), Wouter Graef, Emile Carbone, Jan van Dijk
- Poster 71Electron kinetics description with combined stochastic and Ohmic Fokker-Planck heating operator
Luís L Alves (presenter), Tsanko V Tsankov, Uwe Czarnetzki
- Poster 72Sensitivities of 1-2D Paschen breakdown to scattering and energy partition models
Lucas P Beving (presenter), Matthew M Hopkins, Christopher H Moore
- Poster 73Ensemble Kalman filtering for spatio-temporal parameter estimation in Hall effect thrusters using correlated uncertainties
Clara Boulay (presenter), Anubhav Dwivedi, Kentaro Hara
- Poster 74Experimental and numerical investigation of nanosecond discharges in air gap with hemispherical dielectric layer
Mahdi M Boussa (presenter), Lyes SEBIH, Antoine Herrmann, Ahmad Hamdan
- Poster 75Numerical validation of the d/R scaling law based on the extended paschen's law via 2D fluid and particle-in-cell simulations
Seohui Jang (presenter), Hyun Zun Lee, Min Uk Lee
- Poster 76Plasma cleaning enhancement via static magnetic field in transformer-coupled plasma reactors
Seon Ho Jang (presenter), Hyun Zun Lee, Min Uk Lee
- Poster 77Capacitively Coupled Plasma Breakdown: Simulation of Mechanisms, Circuitry, and Dynamics
Wei Jiang, Dehen Cao, Ya Zhang
- Poster 78Control of Electron Induced Secondary Electron Emission for Plasma Uniformity Improvement in dual-Frequency CCP system
CheolWoong C Kim (presenter), Hae June Lee
- Poster 79Kinetic Analysis of Plasma Uniformity Control Using a Power-Segmented Electrode: 2D Particle-in-Cell Simulation
Seongjong Kim (presenter), Seohui Jang, Min Uk Lee
- Poster 80Simulation study on Electrode-Based Suppression of Standing Wave Effects in Capacitively Coupled Plasma
Hyun Zun Lee (presenter), So Hyun Park, Min Uk Lee
- Poster 81Synthesis and Characterization of carbon nanomaterials obtained in Ar/C2H2 DC glow discharge plasma
Azamat E Abdrakhmanov (presenter), Zhanserik E Ongaibergenov, Almasbek U Utegenov, Sagi Orazbayev, Tekkabul S Ramazanov
- Poster 82Investigation of anode voltage drop in dc glow discharge in CF4
Valeriy Lisovskiy (presenter), Stanislav Dudin, Serhii Rezunenko, Vladimir Yegorenkov
- Poster 83Experimental Characterization of Plasma Instabilities in Moderate-Pressure Capacitively Coupled Plasmas Using Laser-Collision Induced Fluorescence
Brian Z Bentz (presenter), Omar Alsaeed, Cameron M Wagoner, Amanda M Lietz
- Poster 84Edge-Controllable Capacitively Coupled Plasma via Segmented Bias Electrodes
jiwon CHOI (presenter), Sanghoo Park, Hyunseung Lee, Gihyun Song, Hyoungsoo Kim
- Poster 85Effects of self-bias on plasma density distribution in radio frequency capacitively coupled plasmas
Dongyoung Kim (presenter), Hae June Lee
- Poster 86Discharge similarity and scaling networks for low-pressure capacitively coupled radio-frequency CF4 plasmas
Hanyang Li (presenter), Zhenhua Zhou, Yangyang Fu
- Poster 87Influence of magnet arrangement on high-density hydrogen plasma produced by a capacitively coupled magnetized discharge using a hybrid hollow electrode under a lower gas pressure
Yasunori Ohtsu (presenter), Kengo Tazume, Hasibul M Islam, Julian Schulze
- Poster 88Characteristics of RF hybrid plasma produced by capacitively and inductively coupled discharges using mixtures of hydrogen and methane for preparing carbon nano-walls
Yasunori Ohtsu (presenter), Tatsuo Tabaru, Julian Schulze
- Poster 89Plasma Uniformity and DC Self-Bias Control Using a Time-Varying Magnetic Field
Junbeom Park (presenter), Geunwoo Go, Si young Koh, Sangje Lee, Sungwoo Cho, Wooyoung Choi, Jimo Lee, Kyoungsoo Chung, Kyoung-Jae Chung
- Poster 90Dynamics of Capacitively Coupled Plasma under Bipolar Voltage Pulsing for Charge Neutralization in High Aspect Ratio Etching
Junbeom Park (presenter), Kyoungsoo Chung, Jiseong Nam, Geunwoo Go, Kyoung-Jae Chung
- Poster 91Real-Time Plasma Density Measurement using a Capacitance Measurement Sensor Embedded in an Electrostatic Chuck
ChangHee Lee (presenter), JiHwan Kim, InYoung Bang, JaeHyeon Kim, GwangHo Lee, HyoJong Shin, YoonJoo Jeong, InHyeok Kho, YuJin Heo, HeeSam Cheon, Yejun Cheon, GaEun Hwang, GiChung Kwon
- Poster 92Dynamic Three-Wave Coupling between Local Sporadic Spokes and Emergence of Global Breathing Oscillation in Partially Magnetized Cross-Field Plasmas
Jong Yoon Park (presenter), June Young Kim
- Poster 93Real-time temperature monitoring of wafer and focus ring during plasma processing
JaeHyeon Kim (presenter), JiHwan Kim, InYoung Bang, GwangHo Lee, ChangHee Lee, HyoJong Shin, InHyeok Kho, YoonJoo Jeong, YuJin Heo, HeeSam Cheon, GaEun Hwang, Yejun Cheon, GiChung Kwon
- Poster 94Etch Rate Modeling of SiO₂ Using Impedance Monitoring and Optical Emission Spectroscopy
Minseong Kim (presenter), Sang Hee Han, Jaehyeon Kim, Eunchong Park, Heeyeop Chae
- Poster 95Measurement of Plasma Density Using a Electrode Sensor on Wafer in an Inductively Coupled Plasma and Comparison with Other Diagnostic Methods
Hee Sam Cheon (presenter), JiHwan Kim, In Young Bang, JaeHyeon Kim, ChangHee Lee, GwangHo Lee, HyoJong Shin, YoonJoo Jeong, InHyeok Kho, Yejun Cheon, GaEun Hwang, YuJin Heo, GiChung Kwon
- Poster 96Spatially Resolved Endpoint Detection of Silicon Dioxide Etching in CF₄/O₂/Ar Plasma via Multi-Channel Optical Emission Spectroscopy
Sanghee Han (presenter), Jaehyeon Kim, Eunchong Park, Minseong Kim, Heeyeop Chae
- Poster 97Photoionization spectrum of N2
Viatcheslav Kokoouline (presenter), Conner Penson, MEHDI A Ayouz